NANO PRO™ Laboratory Upright Metallurgical Microscope, Reflected Illumination System
- Excellent Infinite Optical System
- Modular Design
- ECO Function
- Comfortable and Easy to Use.
- NIS45 Infinite Plan Semi-APO and APO Objectives
- Focus System
- Ergo Tilting Trinocular Head
- Various Observation Methods
- Darkfield (Wafer)
- Differential Interference Contrast (Conducting Particles)
- Transmitted Light Observation (LCD)
- Polarized Light (Asbestos)
Applications:
NANO PRO™ metallurgical microscopes are widely used in institutes and laboratories to observe and identify the structure of various metal and alloy, it also can be used in electronics, chemical and semiconductor industry, such as wafer, ceramics, integrated circuits, electronic chips, printed circuit boards, LCD panels, film, powder, toner, wire, fibers, plated coatings, other non-metallic materials.
Specifications:
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Item |
Specification |
OM0030 |
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Optical System |
NIS45 Infinite Color Corrected Optical System (Tube length: 180mm) |
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Viewing Head |
Ergo Tilting Trinocular Head, adjustable 0-35° inclined, interpupillary distance 47mm-78mm; splitting ratio Eyepiece:Trinocular=100:0 or 20:80 or 0:100 |
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Seidentopf Trinocular Head, 30° inclined, interpupillary distance: 47mm-78mm; splitting ratio Eyepiece:Trinocular=100:0 or 20:80 or 0:100 |
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Seidentopf Binocular Head, 30° inclined, interpupillary distance: 47mm-78mm |
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Eyepiece |
Super wide field plan eyepiece SW10X/25mm, diopter adjustable |
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Super wide field plan eyepiece SW10X/22mm, diopter adjustable |
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Extra wide field plan eyepiece EW12.5X/16mm, diopter adjustable |
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Wide field plan eyepiece WF15X/16mm, diopter adjustable |
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Wide field plan eyepiece WF20X/12mm, diopter adjustable |
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Objective |
NIS45 Infinite LWD Plan Semi-APO Objective (BF & DF) |
5X/NA=0.15, WD=20mm |
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10X/NA=0.3, WD=11mm |
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20X/NA=0.45, WD=3.0mm |
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NIS45 Infinite LWD Plan APO Objective (BF & DF) |
50X/NA=0.8, WD=1.0mm |
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100X/NA=0.9, WD=1.0mm |
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Nosepiece
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Backward Sextuple Nosepiece (with DIC slot) |
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Condenser |
LWD condenser N.A.0.65 |
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Transmitted Illumination |
24V/100W halogen lamp, Kohler illumination, with ND6/ND25 filter |
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3W S-LED lamp, center pre-set, intensity adjustable |
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Reflected Illumination |
Reflected light 24W/100W halogen lamp, Koehler illumination, with 6 position turret |
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100W halogen lamp house |
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BF1 bright field module |
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BF2 bright field module |
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DF dark field module |
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Built-in ND6, ND25 filter and color correction filter |
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ECO Function |
ECO function with ECO button |
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Focusing |
Low-position coaxial coarse and fine focusing, fine division 1μm, Moving range 35mm |
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Max. Specimen Height |
56mm |
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Stage |
Double layers mechanical stage, size 210mmX170mm; moving range 105mmX105mm (Right or left handle); precision: 1mm; with hard oxidized surface to prevent abrasion, Y direction could be locked |
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Wafer holder: could be used to hold 2”, 3”, 4” wafer |
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DIC Kit |
DIC Kit for reflected illumination (can be used for 10X, 20X, 50X, 100X objectives) |
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Polarizing Kit |
Polarizer for reflected illumination |
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Analyzer for reflected illumination, 0-360° rotatable |
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Polarizer for transmitted illumination |
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Analyzer for transmitted illumination |
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Other Accessories |
0.5X C-mount Adapter |
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1X C-mount Adapter |
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Dust Cover |
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Power Cord |
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Calibration slide 0.01mm |
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Specimen Presser |
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Note: ●Standard parts, ○Optional parts
